IPMS of І.М.Frantsevich of NASU

Themes of scientific discovery

Physical Material Science of Rrefractory Compounds.

Best results

Establishment of laboratory for film deposition of the refractory compounds by unbalanced DC magnetron sputtering.
Development of the technology of magnetron deposition of superhard nanocomposite and wear-resistant coatings based on nanosharuvatyh systems - transition metal compounds (TiN, TiNC, VN, NbN, NbC / ceramic material (SiN_x, SiC, SiCN, AlN, BN, BCN); monolaered coating base on SiC, SiCN, BC_x, BCN, AlN; monolayered amorphous coating base on Al-Mg-B, Al-Mg-B-C, Al-Mg-B-Ti, Al-Mg-B-Si, Al-Mg-B-V, Al-Mg-B-Si-C. Coatings exhibit hardness of 30-40 GPa and a low coefficient of friction 0.07-0.15. Recommendations for use are as the wear resistant, protective coatings and the radiation resistant coatings.
Developed Plasma-chemical deposition technology and wear-resistant solid semiconductor films on Si-C and Si-C-N. Films show hardness 20-35 GPa, low roughness (0.2-0.4 nm) and the coefficient of friction of 0.06-0.1 and colorful photoluminescence in the blue region of the spectrum. Recommendations for use are as the wear resistant, protective coatings and the radiation-resistant coatings, the active layers in semiconductor devices, and in the MEMS and NEMS.

Reference 2 files advertising:

SiCN films for semiconductor devices

Nanotechnologies based on magnetron sputtering (MS) and plasma enhanced chemical vapor deposition (PECVD).

Theoretical calculations

Based on the results of first-principles calculations:

The electronic structure and mechanical properties of crystalline and amorphous Si, SiC and SiCN, as well B₄Cwere comprehensively studied.
Theory of phase transformation in VN and NbN was developed.
Phase transformation in transition metal compounds under pressure was investigated.
The models of the structures of the transition metal compounds/ceramics heterostructures were suggested to explain the structural properties of nanocomposites.
The mechanical properties of these heterostrucres were thoroughly investigated.
The structural, electronic and phonon structure properties, mechanical properties of the AlMgB₁₄ materials were explained.
New materials with special electrical and magnetic properties have been developed.

Development of the technology for manufacturing nanostructured and thick-film resistors for wide range of denominations: magnetic resistors, tenzo resistors, sensitive elements of sensors for various purposes, micro heaters. The initial components of these materials depending on the purpose are barium borides, lanthanum borides, nickel borides, cobalt borides, doped tin oxide, glass phase. The advantage of the developed materials and technologies is that films deposited on a substrate by screen printing, and their nanostructures and functional parameters are formed during heat treatment in air without any protection. This significantly simplifies the technology of film products, significantly (times) reduces the cost and promote their wide application in electronics and instrumentation.

International grants 1997-2015yy

STCU №551, STCU №1590, STCU №1591, STCU №4682, STCU №5539, STCU №5964;
CRDF Contract UK-U2-2589-KV-04; STCU № 3927

Equipment

Apparatuses for deposition and treatment of thin films:

Installation of the unbalanced magnetron sputtering at high rates and for the deposition of nanocomposite and nanolayered coatings. A combination of the sputtering with ECR is used. (Ukraine).
PECVD installation to deposit amorphous and nanocrystalline thin films for optoelectronics and engineering (Ukraine).
The equipment for annealing up to 1200 °C in nitrogen in order to study the thermal stability and in air to study the oxidation resistance.

Apparatuses for the characterization of the deposited coatings:

X-ray diffractometer DRON-2 to identify the structure and grain size of the nanocomposite coatings.
Optic Profilometer "Micron Alpha" (Ukraine) for investigating the thickness and roughness of the coatings.
Microhardness tester„Micron-Gamma-1” (Ukraine) for investigating microhardness and elastic modulus of the films.
Scratch tester "Micron-Gamma-2" (Ukraine), equipped with a Vickers diamond indenter, for investigating a film adhesion and friction coefficient.
Device to estimate the wear coefficient and thickness of the coatings by ball-on-plane tests in the presence of diamond paste (0.1 µm).