Superhard Vacuum Coatings Based on High-Entropy Alloys

Abstract

High-entropy TiZrVNbТа, AlCrFeCoNiCuV, and TiZrHfNbTaCr alloy coatings 2.5–6 µm in thickness and with various phase compositions were deposited by dc magnetron sputtering. The chemical and phase composition of the TiZrVNbТа and TiZrHfNbTaCr coatings remain constant in various deposition conditions. At the same time, the AlCrFeCoNiCuV alloy coatings deposited at maximum substrate bias (Ub= –180 V) are depleted of Al and Cu. All the coatings are nanostructured, and their microhardness varies between 10 and 19 GPa and Young’s modulus changes between 106 and 192 GPa depending on phase composition.