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  4. 07. Department of Physical Material Science of Rrefractory Compounds
  5. Skrynskyy P.
  6. Article

Obtaining and research of nanocomposite films based on TiN/SiN

L.Ivashchenko,
 
P.Skrynskyy,
 
V.Ivaschenko,
 
O.Butenko,
 
S.N.Dub,
 
O.Khyzhun,
 
I.Timofeeva
 

I. M. Frantsevich Institute for Problems of Materials Science of the NAS of Ukraine, Omeliana Pritsaka str.,3, Kyiv, 03142, Ukraine
Nanostructural Material Science - Kiev: Frantsevich Institute for Problems of Materials Science NASU, 2014, #3-4
http://www.materials.kiev.ua/article/1647

Abstract

Monolayered TiN , a-BCN and nanolayerd TiN / BSN coatings were obtained by dual magnetron sputtering method . A comparative study of the impact of the discharge capacity on the ceramic target, flow rate of the reactants and the potential bias on the substrate on mechanical properties of the nanolayerd coatings were investigated. The structure, chemical bonds, mechanical properties, adhesion and friction coatings were studded . It was established that the deposited nanolayerd coatings have the structure nc-TiNx / a-BNO + a-C. It is shown that hardness HK of nanolayerd TiN / BSN-coatings reaches an average of 45 GPa. Nanohardness of coatings is lower than HK by an average of 20-30%. Obtained nanolayerd coatings can be offered for use as protective and strengthening wear-resistant coatings in engineering.


ADHESION, FRICTION COEFFICIENT, MAGNETRON SPUTTERING, MECHANICAL PROPERTIES, NANOLAYERED COATING, WEAR-RESISTANT COATING

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