Characterzation of Ti-B-C-N nanocomposite coatings

Анотація

Nanocomposite Ti-B-N-C coatings were deposited by magnetron sputtering of TiN and B₄C targets in the argon-nitrogen atmosphere at different nitrogen flow rates (FN2). The structure, chemical bonding and mechanical properties were investigated. The results of the investigations of the nanocomposite, TiN and BCN coatings show that the Ti-B-C-N coatings consist of the TiNC nanocrystals (3.4 – 6.5 nm) embedded into the amorphous matrix that consists of amorphous boron nitrogen (a-BN) and amorphous carbon (a-C). The coatings contain a small admixture of titanium oxides that are aggregated at the grain boundaries. The coatings deposited at high nitrogen flow rates were textured. An introduction of nitrogen prompts the formation of the nanocrystallites of the TiN-TiC solid solutions and the a-BN amorphous tissue, which, in turn, causes the improvement of the mechanical properties of the Ti-B-C-N coatings. The best samples exhibited nanohardnes above 39 GPa.